RCe Recirculating Heater/Chiller
Controls recirculating chilling and heating in A and F baths.
Includes low-watt density heater for a long, reliable life
and improved MTBF. Operates on CFC-free HCFC-22 coolant. Low-volume
de-aerating reservoir lowers the cost of ownership through
shorter fill-up and air-purge times. Available in several
heating and cooling capacities, for either 120-2208VAC or
230VAC operation. Temperature range: 18 - 40°C. Call
Terra for complete ordering information.
Terra offers a comprehensive range of constant temperature baths, etching baths, and dump rinsers to meet other size and temperature requirements. Call to discuss your application. |
| Processing
Modules |
Model
below accommodates a single 6" wafer cassett.
Call Terra for other sizes. (Prices include installation) |
 |
Cat.
# |
$/Each |
| Rce
Series* |
7018-34 |
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| Corresponding Controls |
x=Standard
o=Optional |
Heat |
Cool |
Liquid
Level
Sensor
Alarm |
Timer |
Over/
Under
Temp
Alarm |
Pump/
Filter
Control |
Recirculat.
Pump |
Drain
Valve
Control |
Spray
Nozzle
Control |
DI
H2O
Injection |
Cat.
# |
$/Each |
| C21bLSS |
x |
x |
x |
x |
x |
|
x |
|
|
|
7018-37 |
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Options
include pneumatic drain valve and magnetic stirrer; call Terra
for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa,
Nb, RCe (optional)
*Selection of RCe module provides heating/cooling capabilities to the A or F Serries modules.. Model listed is polypropylene; PVDF also available. |
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