1. Home
  2. Vacuum & Test Chambers
  3. Environmental Test Chambers
  4. HEPA Cleanroom Chamber

High-Capacity, HEPA-Filtered
Cleanroom Oven

High-Capacity, HEPA-Filtered Cleanroom Oven
  • Provides stable drying at temperatures to 60°C (140°F) ±2°C
  • 67.5 cubic-foot (1.9 m³) chamber provides ample space for large materials
  • 304 stainless steel construction, inside and out, provides durable, easy-clean surfaces
  • Compact design occupies minimal space but offers roomy internal chamber
  • Internal HEPA-filtered air shower recirculates particle-free air throughout the processing chamber

This oven provides a stable elevated temperature (60°C, ± 2°C) for a very large stainless steel chamber: 36"W x 36"D x 90"H (914 mm x 914 mm x 2286 mm), 67.5 cu. ft. (1.9 m³). Air or process gas is forced through dual HEPA filters located above the ceiling of the process chamber; continuous recirculation ensures temperature uniformity and a better-than Class 100 (ISO 5) process environment.

Includes temperature uniformity certification based on 9-point temperature mapping.


Cat. # Price
2148-15 $ 22,553
Click to leave a message. 24-hour sales and tech phone support, M - F
Call a Terra Vacuum Chamber specialist direct
Hours: 5:30 - 17:30 M-F
(your local time)
Go to...
Go To