Wafer Fab Carts
- A comprehensive range of specialized carts for wafer
fab tools and supplies, including quartz tubes, probes,
injectors, thermocouple rods, and supply bottles
- Electropolished stainless steel surfaces meet the most
stringent cleanliness requirements
- Includes spring-loaded casters for cushioned, low-vibration
rolling
Put Terra's complete manufacturing capabilities to work in
your wafer fab!
In addition to models shown here, carts can be specified
in a variety of plastics, with specialized holding fixtures
to safeguard your sensitive materials during process transfer.
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Terra customizes carts to meet your
requirements!
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Neoprene
thermocouple
rod supports |
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Quartz Tube/Thermocouple Cart
Designed for 300mm-diameter quartz tubes up to 1500mm
long. Includes receptacles for thermocouple rods and
two compartments for tool storage. Made of acid-resistant
polypropylene with a rigid steel support. Overall dimensions:
48"W x 24"D x 72"H (1219 mm x 610 mm x 1829 mm), excluding handle. Includes four 6" (152 mm) diameter casters.
| Cat.# |
$/Each |
| 9600-25 |
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Flexible quartz
tube restraints |
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Quartz Tube Cart
Safely transport heavy quartz tubes nestled into a polypropylene
retaining platform. Precision-routed cut-outs accommodate
several diameters (150 mm, 200 mm and 300 mm). Includes
flexible quartz tube restraints. Electropolished stainless
steel exterior is easy to wipe down. 6" (152 mm) diameter high
density neoprene casters ensure smooth, clean rolling.
Overall dimensions: 48"W x 24"D x 36"H (1219 mm x 610 mm x 914 mm), excluding handle.
| Cat.# |
$/Each |
| 9600-17 |
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Injector Cart
Electropolished stainless steel cart features
four 5.25" x 12.5" (133 mm x 318 mm) injector inserts. Overall dimensions:
21"W x 41.55"D x 25.68"H (533 mm x 1055 mm x 652 mm), excluding handle. Includes four 5" (127 mm) diameter casters.
| Cat.# |
$/Each |
| 9600-26 |
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Laser Jig Cart
Electropolished stainless steel cabinet houses
four drawers. Includes rod rail along top perimeter. Includes four 3" (76 mm) diameter casters (two with brakes).
| Cat.# |
$/Each |
| 9600-28 |
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Probe Equipment Cart
Includes three shelves with polyurethane rollers
and retainers for abrasion-free placement of delicate
probes and other fab equipment. Frame and drawer
are electropolished stainless steel. Includes 4" (102 mm) diameter
high-density neoprene casters. Overall dimensions:
27"W x 24"D x 54"H (686 mm x 610 mm x 1372 mm) excluding handle.
| Cat.# |
$/Each |
| 9600-27 |
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Bottle Cart
Electropolished stainless steel construction,
clean casters, and ergonomic design make this
cart ideal for safely transporting 5' (1524 mm) process
gas canisters. Includes retaining chain. Overall
dimensions: 12.3"W x 31"D x 57"H (312 mm x 787 mm x 1448 mm). Front wheels are 8" (203 mm) diameter, rear wheels are 4" (102 mm) diameter.
| Cat.# |
$/Each |
| 9600-18 |
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