FREE CONSULTATION714-578-6100
  1. Home
  2. Desiccators & Desiccator Cabinets
  3. Plastic Desiccators
  4. Wafer Box Desiccators

Wafer Box Desiccators

  Wafer Box Desiccators
No. 9130-21A (for 200 mm wafer carriers), shown with optional 304 stainless steel door frames, humidity controllers, and stand.
Features Key
  Standard
  Option

A Dual Purge™ System
B NitroWatch® RH Controller
C Stainless Steel Door Frame
D Grounding Terminals (SDPVC models)
E Door Sensor Switches
F Plenum Chamber
G Grounded Door Latch (SDPVC models)
H Stand with Nylon Leveling Feet
I Tamper-Proof Hinges
  Automatic RB®Valve(not shown)
  One-Piece Gasket (inside each door)

Custom designs available for any wafer box or other carrier size—Just let us know your requirements!
CE Mark All desiccator cabinets and Dual Purge™/ NitroWatch® control systems.
CE Declaration


humidity level critical

 


Wafer Box Desiccator with optional 304 stainless steel door frames
No. 9130-23A (for 300 mm wafers), shown with optional 304 stainless steel door frames.
Valuline models include doors without frames.
  • Preserves moisture-sensitive wafers in a dry, particle-free environment
  • Automated nitrogen controls maintain user-selected humidity level (ambient down to 0% RH)
  • Engineered for optimal storage density of 200 mm or 300 mm wafers (in most standard cassettes and lot boxes)
  • Available in strong, rigid acrylic or static-dissipative PVC, which protects against static charges and the particles they attract
  • Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel

These Wafer Desiccators are designed specifically for standard lot boxes used for 200 mm and 300 mm wafers.

Advanced Construction for Unsurpassed Performance

Like Terra's other desiccator lines, they feature the most advanced features available for performance and durability.

All cabinets are designed and fabricated using the latest-generation CAD/CNC equipment, ensuring the perfect form and fit required for optimal sealing. Because all system components are standardized, replacement and optional parts can be ordered at any time. Cabinets feature a plenum chamber for even gas distribution. Humidity controllers.

For optimal sealing and extended service life, select Terra's optional stainless steel door frames, which reinforce the plastic doors and improve seals. Stainless steel door frames include one-piece nonadhesive gaskets guaranteed not to sag or migrate, even in an ultra-dry environment.

Locking LiftLatches™, standard with each cabinet, allow contents to be securely locked. They also remove wear from doors and hinges by eliminating the rotary stress caused by conventional latches. Latches and tamper-proof hinges are chrome plated for cleanliness and durability.

See additional information on stainless steel doors, LiftLatches, and one-piece gaskets.

Installation: Cabinet doors may become misaligned during shipment. Installation should include cabinet alignment to ensure that door sensors and seals are functioning properly.

Select Desiccator and then select corresponding door frames, shelves, shields, stands and other options below. ValuLine models below include doors and an economical design suitable for flowmeter control over nitrogen.
 

 

OR

  Use the QuickQuote tool to help you select the desiccator for your application.
QuickQuote

Wafer Box Desiccators

Models below include stainless steel hardware, a plenum chamber, and gas ports for use with Dual Purge and NitroWatch Systems (order separately), which enhance humidity recovery times. Order stainless steel door frames separately.
Wafer Box Desiccator
Wafer Size
(See notes
below
)
Dimensions
(O.D., nominal)
Chamber
Clearance
No. of
Chambers
Capacity Acrylic* Dissipative PVC**
W" x D" x H"
(mm)
W" x D" x H"
(mm)
Cat. # Price Cat. # Price
200 mm 26.88 x 25.14 x 48.68
(683 x 639 x 1236)
25.62 x 22.62 x 10.87
(650 x 574 x 276)
4 16(1) 9130-45A Price 9130-48A Price
26.88 x 25.14 x 60.88
(683 x 639 x 1546)
25.62 x 22.62 x 10.87
(650 x 574 x 276)
5 20(1) 9130-21A Price 9130-25A Price
53.5 x 25.14 x 36.48
(683 x 639 x 927)
25.62 x 22.62 x 10.87
(650 x 574 x 276)
6
2 per tier
24(1) 9130-46A Price 9130-49A Price
53.5 x 25.14 x 48.68
(1360 x 639 x 1236)
25.62 x 22.62 x 10.87
(650 x 574 x 276)
8
2 per tier
32(1) 9130-47A Price 9130-50A Price
53.5 x 25.14 x 60.88
(1360 x 639 x 1546)
25.62 x 22.62 x 10.87
(650 x 574 x 276)
10
2 per tier
40(1) 9130-20A Price 9130-24A Price
300 mm 19.00 x 26.5 x 63.25
(483 x 673 x 1607)
18.00 x 24.00 x 14.50
(457 x 610 x 368)
4 8(2) 9130-23A Price 9130-27A Price
19.00 x 30.5 x 63.25
(483 x 775 x 1607)
18.00 x 28.00 x 14.50
(457 x 711 x 368)
8(3) 9130-51A Price 9130-53A Price
38.00 x 26.5 x 63.25
(965 x 673 x 1607)
18.00 x 24.00 x 14.50
(457 x 610 x 368)

2 per tier
32(2) 9130-22A Price 9130-26A Price
38.00 x 30.5 x 63.25
(965 x 775 x 1607)
18.00 x 28.00 x 14.50
(457 x 711 x 368)
32(3) 9130-52A Price 9130-54A Price

1- Based on box size of 10.75"W x 10.94"D x 9.88"H (273 x 278 x 249 mm) (Empac No. TR-08A). Capacity based on four boxes per chamber.
2- Based on box size of 15.06"W x 10.5"D x 12.81"H (383 x 267x 325 mm) (Empac No. SX300 01). Capacity based on two boxes per chamber.
3- Based on box size of 17"W x 13.5"D x 13.5"H (432 x 343 x 343 mm). Capacity based on two FOSB 300mm wafer carriers per chamber.

*Acrylic is damaged by alcohol and other cleaning agents.
** All plastic surfaces bounding the storage area are static-dissipative PVC. Removable exterior plenum wall is made of nondissipative material (dissipative PVC rear wall available for $20/desiccator chamber upcharge).

  Door Frames

Wafer Box Desiccator Door Frames
304 Stainless Steel Door Frame Cat. # Price
For 200 mm Wafer cabinets 9130-28A Price
For 300 mm Wafer cabinets 9130-29A Price
Extends service life of cabinet. Order one per chamber.

ValuLine Wafer Box Desiccators

Models below include doors with stainless steel stiffeners and chrome-plated hinges. Designed for use with flowmeter and Automatic Relief/Bleed Valve (order separately). For automated RH control, select models above.
ValuLine Wafer Box Desiccator
Wafer Size
(See notes
below
)
Dimensions
(O.D., nominal)
Chamber
Clearance
No. of
Chambers
Capacity Acrylic* Dissipative PVC**
W" x D" x H"
(mm)
W" x D" x H"
(mm)
Cat. # Price Cat. # Price
200 mm 26.25 x 24.5 x 48.38
(667 x 622 x 1229)
25.88 x 23.25 x 11.75
(657 x 591 x 298)
4 16(1) 9130-55 Price 9130-60 Price
26.25 x 24.5 x 60.19
(667 x 622 x 1529)
25.88 x 23.25 x 11.75
(657 x 591 x 298)
5 20(1) 9130-56 Price 9130-61 Price
53.5 x 24.5 x 36.52
(683 x 622 x 928)
25.88 x 23.25 x 11.75
(657 x 591 x 298)
6
2 per tier
24(1) 9130-57 Price 9130-62 Price
53.5 x 24.5 x 48.38
(1360 x 622 x 1229)
25.88 x 23.25 x 11.75
(657 x 591 x 298)
8
2 per tier
32(1) 9130-58 Price 9130-63 Price
53.5 x 24.5 x 60.19
(1360 x 622 x 1529)
25.88 x 23.25 x 11.75
(657 x 591 x 298)
10
2 per tier
40(1) 9130-59 Price 9130-64 Price
300 mm 19.00 x 26.5 x 63.25
(483 x 673 x 1607)
18.00 x 24.00 x 14.50
(457 x 610 x 368)
4 8(2) 9130-65 Price 9130-69 Price
19.00 x 30.5 x 63.25
(483 x 775 x 1607)
18.00 x 28.00 x 14.50
(457 x 711 x 368)
8(3) 9130-66 Price 9130-70 Price
38.00 x 26.5 x 63.25
(965 x 673 x 1607)
18.00 x 24.00 x 14.50
(457 x 610 x 368)

2 per tier
32(2) 9130-67 Price 9130-71 Price
38.00 x 30.5 x 63.25
(965 x 775 x 1607)
18.00 x 28.00 x 14.50
(457 x 711 x 368)
32(3) 9130-68 Price 9130-72 Price

1- Based on box size of 10.75"W x 10.94"D x 9.88"H (273 x 278 x 249 mm) (Empac No. TR-08A). Capacity based on four boxes per chamber.
2- Based on box size of 15.06"W x 10.5"D x 12.81"H (383 x 267x 325 mm) (Empac No. SX300 01). Capacity based on two boxes per chamber.
3- Based on box size of 17"W x 13.5"D x 13.5"H (432 x 343 x 343 mm). Capacity based on two FOSB 300mm wafer carriers per chamber.

*Acrylic is damaged by alcohol and other cleaning agents.
** All plastic surfaces bounding the storage area are static-dissipative PVC.

Wafer Box Desiccator Stands and Casters

Wafer Box Desiccator and ValuLine Wafer Box Desiccator Stands
For Cabinet Size Powder-coated Steel Stands
(levelers raise 4", 102 mm)
Cat. # Price
26.88"W x 25.14"D 9130-31 Price
53.5"W x 25.14"D 9130-30 Price
19"W x 26.5"D 9130-33 Price
38"W x 26.5"D 9130-32 Price
19"W x 30.5"D 9130-38 Price
38"W x 30.5"D 9130-39 Price
Casters Cat.# Price
Set of 4, including 2 with brakes. 1700-44 Price
RH/Temperature Data Logger
RH/Temperature Data Logger
Provides a convenient record of storage conditions! Placed in a desiccator or glovebox, this compact device accumulates humidity and temperature data at specified intervals for hours, days, weeks, even months. USB connection lets you import and display data in several formats.
Cat. # Price
9500-10 Price

File Type File Name Publication Date
White Paper (PDF) On-Site Nitrogen Generation: Cheaper, Easier, More Reliable
Learn how on-site nitrogen generation saves money by not having to order canisters of inert gas for desiccators, glove boxes and analytical instruments. You can make your own purified nitrogen from compressed air using a sophisticated membrane module (find out how it works!).
06/15/2015
Tech Resource (PDF) Why Desiccator Storage?
A technical overview to how desiccators extend shelf lives and increase product yields.
05/18/2015
Tech Resource (PDF) Why Terra Desiccators?
Compare the many design and fabrication features that make Terra desiccators the most efficient and durable cabinets available.
05/18/2015
Tech Resource (PDF) Why Use Nitrogen?
A guide to how nitrogen purging protects moisture-sensitive materials.
05/18/2015
Tech Resource (PDF) Desiccator Installation and Cleaning
Recommended cleaning techniques and agents for various desiccator materials.
05/18/2015
Manual (PDF) Desiccator Cabinets and RH Controllers: Doc. # 1800-40
This manual provides installation and operating instructions for the following Terra desiccator lines: Adjust-A-Shelf, Pass-through, Wafer Box, Kitticator, Tape and Reel, Farracator and Series 100 through 400. The manual also covers the following RH Controllers: Flowmeter, Dual Purge System and NitroWatch.
08/23/2016
24-hour sales and tech phone support, M - F
Go to...
Go To
Laboratory-Equipment.com