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Air Flow

Terra Part #PriceShips in
120 V5.5 CFMULPA 5100-00 16331 $1,5111-3 Days2
220 V5.5 CFMULPA 5100-00-220 16332 $1,7031-3 Days3
Air Flow
Final Filter Type
Item ordered before. Click on bagde to see the order.

Up to 30-day trial periods, free return shipping and on-site training available for qualified equipment.

Request demo from your product specialist or add note to your order or quote request.

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Custom-configured product: Terra will quote.
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Product Details

• 10-pound, hand-held portable vacuum cleaner ideal for ISO 4-8 cleanrooms

• Four-stage ULPA filtration system, 99.999% efficient with 0.12 µm particles,

• Cloth bag collects and recovers fine dust powders like Gold and Aluminum

• Removes dust from the exhausted air

• Ideal for containing chemical powder spills

• Flexible attachments clean tight corners and delicate equipment

• Sturdy, stainless steel construction ensures clean and dependable performance

• Easy access to bags for replacement

• Removes fumes and contaminants from glove boxes or equipment enclosures

• Supplies clean, ULPA-filtered air to glove box isolators

• Large particles are trapped in a disposable bag and a permanent cloth bag during the first and second vacuum stages, and a fine mesh stainless steel screen in stage three, to extend the life of the final ULPA filter

• Comes complete with a 3' flexible hose, two 20" extension wands, crevice tool, five extra disposable bags, one ULPA Exhaust Filter, Mini-Tool Kit, and carrying case

Features & Benefits

Features and Benefits

Vacuums Chemical Powder Spills

The small size, light weight, and flexible mini-tool attachments of this cleaner make it ideal for cleaning tight corners and delicate equipment that a larger cleaner just can't reach!

Micro-Filtered Air Blower

The MicroVac's 99.999% efficient ULPA filter provides an ultra-clean air source for glove boxes and other particle-free enclosures.

Clean Air Ventilator

Terra's versatile MicroVac vacuum cleaner ventilates process enclosures, capturing micro-contaminants (including biohazards like cyanide powder) to allow safe indoor air release.

Continuous Product Improvement

At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.

Available Accessories

Popular Accessories

For a full list of accessories, select a product then click Choose Accessories on that product page.
  • MicroVac Replacement Disposable Paper Bag Filter
    Stage One disposable paper bag for MicroVac portable cleanroom vacuum cleaner helps remove air’s largest particles, increasing the life and efficiency of the ULPA filter. Packaged 5 in a bag.
  • MicroVac Cleanroom Vacuum Replacement ULPA Filters
    Designed for use in the MicroVac portable vacuum as a replacement Stage 4 filter. The glass-fiber ULPA filter removes particles 0.12 microns with 99.999% efficiency, thereby exhausting particle-free air back into the cleanroom.
  • MicroVac Mini-Tool Attachment Kit
    MicroVac Mini-Tool Kit is ideal for computer keyboards, PC boards, and other small parts. Can be attached to either side of the MicroVac, allowing use as a vacuum or a clean-air blower.

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Manuals & Resources

On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*

  • FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
  • FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
  • FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.

Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.

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