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Terra Part #PriceShips in
Wafer Boxes304Perforated512642Spring-loadedPolyurethaneISO 4 3505-05 30161 $3,3501-3 Days2
Only 3 left in stock
Wafer Boxes304Rod311840Spring-loadedPolyurethaneISO 4 9600-14 25687 $3,7901-3 Days3
Only 2 left in stock
Type
Material
Shelf Type
Width
Depth
Height
Caster Type
Wheel Material
ISO Class
Item ordered before. Click on bagde to see the order.

Up to 30-day trial periods, free return shipping and on-site training available for qualified equipment.

Request demo from your product specialist or add note to your order or quote request.

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Free shipping in contiguous USA
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
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Product Details
  • ISO Rating: ISO 4, ISO 5, ISO 6, ISO 7, ISO 8
  • Ultra-clean stainless steel cart suitable for Class 1/ISO 3 cleanrooms
  • Ideal to transport silicon wafers during integrated circuit fabrication applications
  • Smooth surfaces and corners are easy to clean, will not produce contaminants during sterilization
  • All-stainless steel construction facilitates cleaning and sterilization, resists harsh biocides
  • Meets ASTM, IEST, ISO 14644-1, cGMP standards
  • Sized for secure, space-efficient transport of 150mm, 200mm and 300mm wafer boxes
  • Rod-shelf models and Perforated-shelf models available to optimize laminar air flow and minimize particle accumulation
  • Angled shelves position wafer boats securely against retaining rails
  • Spring-loaded 6" (152 mm) locking polyurethane casters ensure smooth rolling to protect wafers in transit
  • Standard sizes available for common lot box sizes, including 300 mm wafers
  • Rod-shelf cart configured to transport up to four 8" or 12" (203 mm and 305 mm) wafer boats
  • Perforated-shelf cart capacity: holds twelve 8" (200 mm) lot boxes, or eight 12" (300 mm) lot boxes

Carts

  • Stainless Steel Wafer Box Cart with Rod Shelves Stainless Steel Wafer Box Cart
  • desiccator cart with fully welded stainless steel frame and built-in amber acrylic desiccator cabinet BioSafeĀ® Cleanroom Cart with built-in Desiccator Cabinet
Features & Benefits

Features and Benefits

Electropolished Stainless Steel Single Sided Wafer Box Cart

Secure, convenient wafer lot box transport. Wafer boxes not inclulded.

Wafer Box Cart; Electropolished Stainless Steel, Perforated Shelves

BioSafeĀ®: Terra's Ultimate Cleanliness Rating

Terra's BioSafe products are designed for the most critical applications: no gaps and crevices where microbes colonize, rounded corners for easy disinfection, won't produce contaminants during sterilization, and exceeds cGMP, IEST, ASTM and ISO 14644-1 requirements.

Ultra-Clean Cleanroom Compliant Chemo Cart

Custom sizes and configurations are no problem. Customize stainless steel carts for unique sterile operations such as transportation of hazardous chemotherapy drugs.

Spring-Loaded Polyurethane Casters for Clean, Smooth Transit

Shock-absorbing spring-loaded polyurethane casters help protect sensitive microelectronics from shock and vibration during transit in cleanroom carts. Chemical resistant, non-marring urethane wheels are ideal for clean room environments.

Clean, Dry, ESD-Safe Transport Solutions

Configure BioSafeĀ® cleanroom carts with built-in desiccator cabinets for highly sensitive biomedical materials. The nitrogen desiccator cabinet adds an extra layer of protection to provide a dry, inert environment. Amber acrylic filters out UV and blue light.

Easy to Sterilize Continuous Seam Welds

Continuous seam welds eliminate hard to clean cracks and crevices for an easy to sterilize, autoclave safe medical cart.

Continuous Product Improvement

At Terra, we strive to develop and produce the highest quality products for our customers to improve health, safety, performance, and yields. Our product quality is enabled by high-grade manufacturing equipment and processes, 45 years of engineering and application expertise, and our commitment to continuously improve.

Catalog of CE-Marked Products

Terra offers over 1,700 CE-marked products configured for international voltage requirements

Products Compliant With Your ISO Rating

Provide Terra with your desired ISO rating. We will tailor the product to meet your rating and certify it with the serial numbers appended to your invoice, to be included in your compliance package.
Available Accessories
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
  • Electropolish Finish

    Electropolishing increases corrosion resistance and improves ease of cleaning with a smooth, reflective, mirror-like finish.
  • ESD-Safe Grounding Chain

    Grounding chains can be welded to the bottom of stainless steel cleanroom carts to dissipate static electricity for ESD-sensitive applications.
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Manuals & Resources

On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*

  • FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
  • FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
  • FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.

Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.

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