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| No. 9130-23A (for 300 mm wafers), shown with optional 304 stainless steel door frames |
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Preserves moisture-sensitive wafers in a dry, particle-free environment
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Automated nitrogen controls maintain user-selected humidity level (ambient down to 0% RH)
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Engineered for optimal storage density of 200mm or 300mm wafers (in most standard cassettes and lot boxes)
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Available in strong, rigid acrylic or static-dissipative PVC, which protects against static charges and the particles they attract
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Advanced construction features include plenum chamber, 304 stainless steel door frames, LiftLatches™, and one-piece front sealing panel
These Wafer Desiccators are designed specifically for standard lot boxes used for 200mm and 300mm wafers.
Advanced Construction for Unsurpassed Performance
Like Terra's other desiccator lines, they feature the most advanced features available for performance and durability.
All cabinets are designed and fabricated using the latest-generation CAD/CNC equipment, ensuring the perfect form and fit required for optimal sealing. Because all system components are standardized, replacement and optional parts can be ordered at any time. Cabinets feature a plenum chamber for even gas distribution. Humidity controllers.
For optimal sealing and extended service life, select Terra's optional stainless steel door frames, which reinforce the plastic doors and improve seals. Stainless steel door frames include one-piece nonadhesive gaskets guaranteed not to sag or migrate, even in an ultra-dry environment.
Locking LiftLatches™, standard with each cabinet, allow contents to be securely locked. They also remove wear from doors and hinges by eliminating the rotary stress caused by conventional latches. Latches and tamper-proof hinges are chrome plated for cleanliness and durability.
See additional informationon stainless steel doors, LiftLatches, and one-piece gaskets.
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Ordering Information: Chambers for 300 mm Wafers
| Wafer Box Desiccator, One Chamber per Tier |
Wafer Size
(See notes
below) |
Dimensions
(O.D., nominal) |
Chamber
Clearance |
No. of
Chambers |
Capacity |
Acrylic* |
Dissipative
PVC** |
W" x D" x H"
(mm) |
W" x D" x H"
(mm) |
Cat. # |
$/Each |
Cat. # |
$/Each |
| 300mm |
38.00 x 26.5 x 63.25
(965 x 673 x 1607) |
18.00 x 24.00 x 14.50
(457 x 610 x 368) |
8 |
16(2) |
9130-22A |
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9130-26A |
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| 300mm |
19.00 x 26.5 x 63.25
(483 x 673 x 1607) |
18.00 x 24.00 x 14.50
(457 x 610 x 368) |
4 |
8(2) |
9130-23A |
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9130-27A |
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1- Based on box size of 10.75"W x 10.94"D x 9.88"H (273 mm x 278 mm x 249 mm) (Empac No. TR-08A). Capacity based on four boxes per chamber.
2- Based on box size of 15.06"W x 10.5"D x 12.81"H (383 mm x 267 mm x 325 mm) (Empac No. SX300 01). Capacity based on two boxes per chamber.
| *Acrylic is damaged by alcohol and other cleaning agents. |
** All plastic surfaces bounding the storage area are static-dissipative PVC. Removable exterior plenum wall is made of nondissipative material (dissipative PVC rear wall available for $20/desiccator chamber upcharge).
Stands, Door Frames
| Wafer Box Desiccator Corresponding Options, Stands and Door Frames |
For Acrylic Desiccators
Cat. #s |
For Dissipative PVC Desiccators
Cat. #s |
Stand(4)
(levelers raise 4", 102 mm) |
304 Stainless Steel
Door Frame(3) |
| Cat. # |
$/Each |
Cat. # |
$/Each |
|
9130-22A |
9130-26A |
9130-32 |
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9130-29A |
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|
9130-23A |
9130-27A |
9130-33 |
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9130-35A |
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3- Extends service life of cabinet. Order one per chamber.
4- Powder-coated Steel. Order casters above.
Casters
| |
Cat.# |
$/Each |
Casters
Set of 4, including 2 with brakes. |
1700-44 |
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Ordering Information: Chambers for 200 mm Wafers
| Wafer Box Desiccator, Two Chambers per Tier |
Wafer Size
(See notes
below) |
Dimensions
(O.D., nominal) |
Chamber
Clearance |
No. of
Chambers |
Capacity |
Acrylic* |
Dissipative
PVC** |
W" x D" x H"
(mm) |
W" x D" x H"
(mm) |
Cat. # |
$/Each |
Cat. # |
$/Each |
| 200mm |
53.5 x 25.14 x 60.88
(1359 x 639 x 1546) |
25.62 x 22.62 x 10.87
(650 x 574 x 276) |
10 |
40(1) |
9130-20A |
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9130-24A |
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| 200mm |
26.88 x 25.14 x 60.88
(683 x 639 x 1546) |
25.62 x 22.62 x 10.87
(650 x 574 x 276) |
5 |
20(1) |
9130-21A |
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|
9130-25A |
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1- Based on box size of 10.75"W x 10.94"D x 9.88"H (273 mm x 278 mm x 249 mm) (Empac No. TR-08A). Capacity based on four boxes per chamber.
2- Based on box size of 15.06"W x 10.5"D x 12.81"H (383 mm x 267 mm x 325 mm) (Empac No. SX300 01). Capacity based on two boxes per chamber.
| *Acrylic is damaged by alcohol and other cleaning agents. |
** All plastic surfaces bounding the storage area are static-dissipative PVC. Removable exterior plenum wall is made of nondissipative material (dissipative PVC rear wall available for $20/desiccator chamber upcharge).
Stands, Door Frames,
| Wafer Box Desiccator Corresponding Options – Stands and Door Frames |
For Acrylic
Desiccators
Cat. #s |
For Dissipative PVC
Desiccators
Cat. #s |
Stand(4)
(levelers raise 4", 102 mm) |
Select appropriate quantity |
| Cat. # |
$/Each |
Cat.
# |
$/Each |
|
9130-20A |
9130-24A |
9130-30 |
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9130-28A |
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|
9130-21A |
9130-25A |
9130-31 |
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9130-34A |
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3- Extends service life of cabinet. Order one per chamber.
4- Powder-coated Steel. Order casters above.
Casters
|
Cat.# |
$/Each |
Casters
Set of 4, including 2 with brakes. |
1700-44 |
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|
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