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QA Series Quartz Constant-Temperature Bath

QA Series Quartz Constant-Temperature Bath
Unsurpassed temperature uniformity in etching, stripping and cleaning operations using H2SO4, HCl and other chemistries
  • Ideal for etching, stripping and cleaning
  • Ultra-pure, 99.995% contaminant-free processing vessel is ideal for critical chemistries
  • Externally bonded 5-sided circuit heating element provides efficient, even heating for improved process yields
  • Redundant safety features minimize potential damage caused by runaway temperatures
  • Seamless, sloped run-off flange contributes to a longer vessel life
  • Housing is flame-retardant, stress-relieved polypropylene (UL-94 V-O rated)
Processing Modules
Models below accommodate a single 6" (152 mm) wafer cassette.
Call Terra for other sizes. (Prices include installation)

Cat. # Price
Qa Series 7018-28 Price
Corresponding Controls
x=Standard
o=Optional
Heat Cool Liquid
Level
Sensor
Alarm
Timer Over/
Under
Temp
Alarm
Pump/
Filter
Control Switch
Recirculat.
Pump
Drain
Valve
Control
Spray
Nozzle
Control
DI H2O
Injection
Cat. # Price
C1115aLLS x
x x


o

7018-35 Price
Options include pneumatic drain valve and magnetic stirrer; call Terra for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa, Nb, RCe (optional)
Constant temperature bath

The QA Series Constant-Temperature Bath provides unsurpassed temperature uniformity: ± 1°C in the 30 - 190°C temperature range. Because the grid heater is bonded to the outside and bottom of the pure virgin quartz vessel, it provides fast, even, efficient heating. The vessel is sealed into a protective polypropylene housing.

The result is a one-piece, seamless, leak-proof process vessel with no devitrification. The dramatically sloped run-off design diverts acids and other process liquids away from the flange. Safety features include an overtemperature thermocouple, failsafe power cut-off, with visible and audible alarms, liquid level sensor tube, and an ultra-reliable snap disk that cuts power if the temperature exceeds unsafe levels.

QA Series Constant Temperature Baths are available in many sizes and configurations for operation with most wafer sizes. Options include a magnetic stirrer, gravity drain, aspirator (dilution) valve system, and quartz bubbler. Call to discuss your application with a Terra process engineer.

Which Material is Best?

Polypropylene

  • Economical plastic with broad chemical compatibility
  • Ideal for wet processing station panels
  • Loses some chemical resistance at high temperatures
  • Suitable for HF and KOH processes
 

PVDF (polyvinyldilene fluoride)

  • Broader range of chemical resistance than polypropylene
  • Suitable for high process temperatures
  • Ideal for HF and BOE processes at high temperature

Quartz

  • The preferred material for ultra-pure applications
  • Provides greater uniformity in heat transfer than plastic baths—ideal for very tight temperature control
  • Suitable for most chemicals (but not HF acid)
  • Hard surfaces won't scuff, stain, or absorb impurities
 

PTFE (Teflon®)

  • Resistant to an extremely wide range of chemicals
  • Perfect for KOH and HF acid (which etch quartz)
  • Softer than quartz, so care must be taken to avoid scuffing, staining
Specifications
Materials: Internally flame-polished, virgin fused quartz, boron-free (process vessel); Flame-retardant polypropylene (housing)
Electrical: 208 - 240 VAC, single phase, 50/60Hz, 7 - 20 amps (depending on size)
Process Thermocouple: J-type Teflon® encapsulated
Insulation: High-density alumina silica fiber rated to 1260°C
Note: Microprocessor controller is required for operation. See sidebar for capabilities listing.
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