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Electropolished 304 Stainless Steel
Work-In-Process (WIP) Racks
Work-In-Process (WIP) Racks
Rod Shelf WIP Rack
  • Clean, secure enclosure protects WIP materials from breakage or contamination during processing
  • Ergonomic design increases productivity
  • 17° shelf slope ensures safe product positioning against rear retaining bar
  • All-electropolished 304 stainless steel construction won't particulate, wipes down without snags
  • Wafer WIP box sizing conserves valuable cleanroom floor space by optimizing shelf capacities
  • Custom dimensions and enclosure panels available—just give us your specs!
WIP Racks–12" (305 mm) Shelf Clearance (for 150mm and 200mm wafers)
Dimensions
W" x D" x H"
(mm)		 No. of
Shelves 		Capacity Rod Shelves Perforated Shelves
150mm 200mm
Cat. # Price Cat. # Price
38 x 12 x 36
(965 x 305 x 914)		 2 6-10• 6 9611-00 * Details 9611-24 * Details
38 x 12 x 48
(965 x 305 x 1219)		 3 9-15• 9 9611-01 * Details 9611-25 * Details
38 x 12 x 60
(965 x 305 x 1524)		 4 12-20• 12 9611-02 * Details 9611-26 * Details
38 x 12 x 72
(965 x 305 x 1829)		 5 15-25• 15 9611-03 * Details 9611-27 * Details
38 x 18 x 36
(965 x 457 x 914)		 2 12-20•• 6 9611-04 Details 9611-28 Details
38 x 18 x 48
(965 x 457 x 1219)		 3 18-30•• 9 9611-05 Details 9611-29 Details
38 x 18 x 60
(965 x 457 x 1524)		 4 24-40•• 12 9611-06 Details 9611-30 Details
38 x 18 x 72
(965 x 457 x 1829)		 5 30-50•• 15 9611-07 Details 9611-31 Details
38 x 28 x 36
(965 x 711 x 914)		 2 18-40••• 12 9611-08 Details 9611-32 Details
38 x 28 x 48
(965 x 711 x 1219)		 3 27-60••• 18 9611-09 Details 9611-33 Details
38 x 28 x 60
(965 x 711 x 1524)		 4 36-80••• 24 9611-10 Details 9611-34 Details
38 x 28 x 72
(965 x 711 x 1829)		 5 45-100••• 30 9611-11 Details 9611-35 Details
48 x 12 x 36
(1219 x 305 x 914)		 2 8-12• 6 9611-12 * Details 9611-36 * Details
48 x 12 x 48
(1219 x 305 x 1219)		 3 2-18• 9 9611-13 * Details 9611-37 * Details
48 x 12 x 60
(1219 x 305 x 1524)		 4 16-24• 12 9611-14 * Details 9611-38 * Details
48 x 12 x 72
(1219 x 305 x 1829)		 5 20-30• 15 9611-15 * Details 9611-39 * Details
48 x 18 x 36
(1219 x 457 x 914)		 2 16-24•• 6 9611-16 Details 9611-40 Details
48 x 18 x 48
(1219 x 457 x 1219)		 3 24-36•• 9 9611-17 Details 9611-41 Details
48 x 18 x 60
(1219 x 457 x 1524)		 4 32-48•• 12 9611-18 Details 9611-42 Details
48 x 18 x 72
(1219 x 457 x 1829)		 5 40-60•• 15 9611-19 Details 9611-43 Details
48 x 28 x 36
(1219 x 711 x 914)		 2 24-36••• 12 9611-20 Details 9611-44 Details
48 x 28 x 48
(1219 x 711 x 1219)		 3 36-54••• 18 9611-21 Details 9611-45 Details
48 x 28 x 60
(1219 x 711 x 1524)		 4 48-72••• 24 9611-22 Details 9611-46 Details
48 x 28 x 72
(1219 x 711 x 1829)		 5 60-90••• 30 9611-23 Details 9611-47 Details
* Require 2.5" (64 mm) Diameter Mounting Feet, Cat. # 1540-04-2
• Cassettes are loaded one row across per shelf.
•• Cassettes are loaded two rows across per shelf.
••• Cassettes are loaded three rows across per shelf.

NOTE: Capacities are based on Empak model HS300-02B. All capacities are based on one row of cassettes per shelf.
WIP Racks–14" (356 mm) Shelf Clearance (for 300mm wafers)
Dimensions
W" x D" x H"
(mm)		 No.
Shelves 		Capacity
150mm 		Rod Shelves Perforated Shelves
Cat. # Price Cat. # Price
38 x 12 x 38
(965 x 305 x 965)		 2 4 9611-48 * Details 9611-60 * Details
38 x 12 x 52
(965 x 305 x 1321)		 3 6 9611-49 * Details 9611-61 * Details
38 x 12 x 66
(965 x 305 x 1676)		 4 8 9611-50 * Details 9611-62 * Details
38 x 18 x 38
(965 x 457 x 965)		 2 6** 9611-51 Details 9611-63 Details
38 x 18 x 52
(965 x 457 x 1321)		 3 9** 9611-52 Details 9611-64 Details
38 x 18 x 66
(965 x 457 x 1676)		 4 12** 9611-53 Details 9611-65 Details
55 x 12 x 38
(1397 x 305 x 965)		 2 6 9611-54 * Details 9611-66 * Details
55 x 12 x 52
(1397 x 305 x 1321)		 3 9 9611-55 * Details 9611-67 * Details
55 x 12 x 66
(1397 x 305 x 1676)		 4 12 9611-56 * Details 9611-68 * Details
55 x 18 x 38
(1397 x 457 x 965)		 2 8** 9611-57 Details 9611-69 Details
55 x 18 x 52
(1397 x 457 x 1321)		 3 12** 9611-58 Details 9611-70 Details
55 x 18 x 66
(1397 x 457 x 1676)		 4 16** 9611-59 Details 9611-71 Details
* Require 2.5"  (64 mm) Diameter Mounting Feet Cat. # 1540-04-2. Otherwise, glide is included.
** Based on cassettes loaded with wafers facing to the side. Models without asterisks load with cassettes facing front.
These WIP racks safeguard delicate products while making optimal use of valuable cleanroom space.

Certified Class 1-Compatible
Fabricated of 1" (25 mm)-square 304 stainless steel tubes, these racks feature continuous seam welds and extensive surface finishing to prevents snags or crevices. The all-electropolished 304 stainless steel surfaces won't shed particles or outgas chemicals. They have been independently certified compatible for use in Class 1 cleanrooms.

Their shelves optimize the vertical laminar airflow inside a cleanroom and minimize the possibility of particle accumulation. Choose between rod shelves, made of .25" (6 mm)-diameter rods on 2" (51 mm) centers, or shelves with .75" (19 mm)-diameter perforations, which provide approximately 40% open space. Both shelf types are mounted at a 17° angle to position WIP boxes securely against a rear retaining rod. Side flanges keep materials from slipping off the side edges. Shelves are designed for optimal storage densities of common wafer transport cassettes and WIP boxes (see ordering chart for capacities)

All models feature polypropylene leveling feet. 304 stainless steel mounting plates are also available (see below). Racks can also be customized to accommodate special parts or capacity requirements; just send us your specifications.

NOTE: 150mm capacities are based on the following: lower end, Fluoroware model PA182-50MB wafer cassette, upper end, Empak model TR15-01 wafer box. 200mm capacities are based on Empak model HA200 wafer box.
Mounting Feet

Mounting Feet
Electropolished 304 stainless steel leveling feet feature cut-outs to allow bench to be bolted to the floor.

Diameter Cat. # Price
2.5" (64 mm)
 1540-04-2 Details
3.5" (89 mm)
 1540-05-2 Details
Other WIP Storage Solutions
Select a standard unit, or put Terra's design and fabrication experience to work on a system customized to your specs!
Wall-Recessed WIP Storage Cabinet   Wall-Recessed WIP Storage Cabinet
Made of all-electropolished stainless steel, this cabinet fits into a cleanroom wall cut-out to eliminate floorspace requirements altogether!

The model shown features five shelves made of .25" (6 mm)-diameter rods on 2" (51 mm) centers. Dimensions: 48"W x 12"D x 60"H (1219 mm x 305 mm x 1524 mm). Call for specify other sizes or configurations!

Cat.# Price
9611-90 Details
   
Wall-Mount WIP Racks   Wall-Mount WIP Racks
Made of electropolished 304 stainless steel rods, these wall-mount WIP racks can be modified to accommodate other WIP storage boxes. Call with your requirements!
For 200mm Wafer Lot Boxes
Capacity Cat.# Price
One 9611-91 Details
Two 9611-92 Details
Three 9611-93 Details
Four 9611-94 Details
   
cln_terpprack   WIP Rack with Polypropylene Liners
These racks are ideal for WIP storage of quartz tubes and large fab tools that may have surface chemical residues. The polypropylene liners resist most acids and can be easily removed for cleaning. Racks can be customized for your application.

Cat.# Price
Model Shown 9611-95 Details
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