Process Gas Heaters & Coolers

Constant Temperature Control System shown with Series 300 Glove Box. (Order desired glove box separately.)

Typical application with NitroWatch/DualPurge humidity controllers (not included)

Constant Temperature Control System

• Designed for constant temperature settings between 120°F and -25°F
• Includes heater and refrigeration modules
• PLC-based recipes available for multiple temperature cycles

With a heater and refrigeration module working together to maintain a specific temperature, this constant temperature control system offers a more powerful alternative to Terra's flow-through Process Gas Cooler.

This system consists of compressor/condenser unit and heater, mounted inside a 304 stainless steel housing, and an evaporator cooler, mounted inside the chamber. The closed-loop refrigeration unit operates with an environmentally friendly coolant (CFC free) and uses a RTD sensor, which provides continuous temperature display and overtemperature protection with an internal bypass to prevent temperature overshoot.

The system's evaporator cooler, mounted in an aluminum housing, includes an integral fan that recirculates process gas inside the chamber through the cooling coils. Standard controller allows user to establish a constant temperature set point. A PLC controller, programmed for multiple temperature cycles, is available on an optional basis.

Double-Wall, Insulated Glove Boxes Available!—
Call for a quotation.

In most cases, these modifications include a double-wall design with 2" to 4" of polyurethane insulation, depending on the process temperature.

Call Terra to discuss your particular requirements!

Typical application with NitroWatch/DualPurge humidity controllers (not included).

• Efficient refrigerated unit cools process gas 50°F below ambient, down to 15°F. (For lower temperatures, select Terra's Constant Temperature Control System above.)
• Lowers dew point of incoming gas to retard chemical reactions and organic decay
• Compensates for heat-generating process equipment to maintain a stable processing environment
• Small, lightweight unit fits on top of chamber
• Can be used in conjunction with the Humex™, Dryex™, Nitrogen Generator and Process Gas Heater to form an integrated environmental control system

The Process Gas Cooler adds cooling capability to Terra's line of environmental control devices.

It incorporates a high-efficiency refrigeration unit that provides effective flow-through cooling down to 15°F. Used with a desiccator or glove box system, it helps to retard chemical processes (such as oxidation) and extend the shelf life of stored materials. This low-temperature capability is especially important in chambers that include heat-generating equipment that disrupts a stable processing temperature.

Price includes installation, with all necessary gas plumbing, in any desiccator, glove box or process chamber ordered from Terra.

It includes a pressure and temperature monitor and Ethernet connection to allow remote monitoring. The explosion-proof design uses clean materials for non-contaminating operation, including an all-stainless steel gas path.

Typical application with NitroWatch/DualPurge humidity controllers (not included).

• Provides controlled heating of process gases (such as nitrogen and argon) to facilitate a wide range of manufacturing operations
• In a controlled atmosphere chamber,
  • enhances component drying and epoxy curing;
  • allows safe preheating of components before welding;
  • performs temperature testing of finished components
• Reduces thermal shock before oven baking
• Features thermal exchange system with isolated heater for optimal safety and cleanliness
• Maintains stable temperatures

Terra Universal's Process Gas Heater provides a safe and highly accurate way to enhance a variety of semiconductor and other processing operations.

Programmable Controller Ensures Safe, Clean Heating, Provides Overtemperature Protection

Within a matter of seconds, it raises the temperature of the process gas (such as nitrogen, argon or oxygen) up to 350°F (see performance graphs). The thermostatic control ensures temperature stability.

Its isolated heating system provides controlled heating without direct contact with the process gas—guaranteeing safe, noncontaminating operation with potentially explosive gases. The "smart" programmable temperature controller monitors and responds to gas temperature measured at the outlet, continuously adjusting the temperature profile and guarding against temperature overshoot. A digital readout toggles between the user-defined set point and the actual gas temperature.

The Process Gas Heater comes complete with a temperature controller with digital LCD readout and .125" compression inlet/outlet fittings for gas tubing.