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Terra Part #Price Ships in
304 Stainless Steel HEPA-Filtered Free Standing 28" 6 Shelves 25" 62" ISO 6 ISO 5 9130-03A $6,021 1-3 Days2
Only 1 left in stock
304 Stainless Steel HEPA-Filtered Free Standing 28" 3 Shelves 25" 38" ISO 6 ISO 5 9130-02A $5,269 1-3 Days3
Only 1 left in stock
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Certified ISO Grade Design
ISO Rated Air Cleanliness
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Request demo from your product specialist or add note to your order or quote request.

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*See discounts and promos in cart Web-exclusive discount applies only to quotes/orders placed directly on our website; not valid for phone, email, or other ordering methods.
*includes web discount for online orders Web-exclusive discount applies only to quotes/orders placed directly on our website; not valid for phone, email, or other ordering methods.
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
Custom-configured product. Contact Terra by phone, chat or email for a project-specific quote.
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Product Details
Product Details
  • Available Certified ISO Grade Designs: ISO 6, ISO 7, ISO 8
  • Configurable with or without laminar flow HEPA/ULPA filter system.
  • Ideal for clean storage of ESD-sensitive small parts and non-stackable materials, such as small PC boards, microscope slides, medical devices
  • Suitable to store and organize hundreds of reticle or photomask cassettes in a particle-free environment
  • Removable sliding trays streamline operations and inventory management
  • Transparent static dissipative PVC construction protects against ESD build-up, particle aggregation
  • Perforated trays and open bottom optimize vertical laminar airflow.
  • Each slide-out shelf includes three removable stainless steel trays.
  • Enclosed cabinet design conserves valuable cleanroom floor space, enhances inventory organization.
  • 304 stainless steel construction ensures non-contaminating storage environment.

HEPA-Filtered Storage Cabinets

  • universal adjustable base stands Universal Base Stands Offer Excellent Versatility
  • Adjusting universal stand Universal Stand Adjusts to Fit a Wide Range of Equipment
  • Storage Cabinet, Photomask/Reticle Reticle/Photomask Storage Cabinets
  • Smart® Humidity Module upgrade tutorial Installing Terra's ValuLine® Desiccator Smart® Controller
  • Watch Terra's Video on a HEPA Filtered Laminar Flow Cabinet Smoke Test
universal adjustable base stands
Adjusting universal stand
Storage Cabinet, Photomask/Reticle
Smart® Humidity Module upgrade tutorial
Features & Benefits

Features & Benefits

Learn More: Filter Fan Units Prevent Infection

Did You Know?
HEPA/ULPA Filters Do More Than Meet ISO Requirements - they also prevent infection.

Most cleanroom professionals understand that HEPA and ULPA filters capture contaminants that degrade particle-sensitive samples. But they also help remove bacteria, mold spores, and many viruses that contribute to a host of infections.

Most common bacteria are contained by the 0.3-micron pore size of high-efficiency particular air (HEPA) filters. Ultra-Low Penetration Air (ULPA) filters, which are rated 99.999% efficient at retaining particles of 0.12 microns and larger in diameter, capture ultra-fine contaminants, including many large viruses and mold spores.

These filters also remove aerosol-born pathogens - germs that hitch a ride on larger particles and liquid droplets that are captured in a HEPA or ULPA filter. HEPA- or ULPA-based Fan/Filter Units (FFUs) thus can play an important role in infection prevention in surgical theaters, ICUs and other medical settings.

Additionally, HEPA filters can help filter pollen, tiny insects, bacteria, mold, and other fungal spores that might be present during plant tissue culture or cannabis production. Contaminants such as these can find a way in via personnel or normal HVAC units and can blight crops and reduce yields. HEPA Filters help increase crop yields, pass inspection/meet regulations, and reduce contamination.

Here is a list of common human pathogens that HEPA/ULPA filters capture and remove from circulation:

Pathogens: Bacteria and Diseases
  • SARS-CoV-2: Coronavirus (COVID-19)
  • Escherichia coli: Gastrointestinal infection
  • Bacillus anthracis : Anthrax
  • Aspergillus brasiliensis: Sinus infections
  • Francisella tularensis: Tularemia
  • Bordetella pertussis : Whooping cough
  • Mycoplasma pneumoniae: Pneumonia
  • Chlamydia pneumoniae: Bronchitis
  • Chlamydia psittaci : Psittacosis
  • Klebsiella pneumoniae: Opportunistic infections
  • Haemophilus influenzae : Meningitis
  • Coxiella burnetii: Q fever
  • Pseudomonas aeruginosa: Opportunistic infections
  • Actinomyces israelii: Actinomycosis
  • Legionella pneumophila: Legionaire's disease
  • Thermoactinomyces sacchari: Farmer's lung
  • Alcaligenes: Opportunistic infections
  • Streptococcus pyogenes: Scarlet fever
  • Mycobacterium Tuberculosis: Tuberculosis

Stainless Steel Removable Trays

Removable stainless steel trays for ease of cleaning and material transport. Featured trays can be utilized for organizing reticle or photomask casettes, engineered with particle and ESD protection.

Protecting Personal Information

Terra is committed to ensuring that our customer’s personal information is secure. In order to prevent unauthorized access or disclosure, Terra has developed procedures to safeguard and secure information collected online and offline.

Global Customer Base

At Terra, we are committed to providing top-tier equipment to customers throughout the world. Over the past 5 years, clients in over 100 countries have purchased equipment from Terra.
Available Accessories
Popular Accessories
For a full list of accessories, select a product then click Choose Accessories on that product page.
  • Universal Base Stands Offer Excellent Versatility

    Universal base stands support and stabilize various equipment sizes. Adjustable telescoping members allow for a precise fit. Choose between stainless and powder-coated steel to fit your desired application.
  • Universal Stand Adjusts to Fit a Wide Range of Equipment

    Terra's Universal stands easily adjust to fit a wide range of equipment. Multi-purpose stand frames are suitable for many types of cleanroom equipment, including refrigerators, freezers, incubators, ovens, and vacuum chambers.
  • Heavy-Duty Casters

    Double ball-bearing design ensures extra strength and smooth rolling.
  • Reticle/Photomask Divider

    Securely stores and organizes reticle or photomask cassettes in a particle-free environment and feature tension clips to eliminate any possible vibration while cabinet is in transit.
  • Universal Adjustable Equipment Base Stands

    Stainless steel or powder-coated steel, cleanroom-compliant stands easily adjust to fit industry-standard cabinets, desiccators, vacuum chambers, refrigerators, incubators and ovens. Raises equipment to ergonomic height to support disinfection and sample monitoring.
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Manuals & Resources

On a tight schedule? Choose FasTrak 24/7 Priority Service to help meet your critical schedule for Terra-manufactured products, either before or after your order is placed.*

  • FasTrak 24/7 provides a 24/7 commitment to meet the shipping date YOU specify, regardless of quoted lead times.
  • FasTrak 24/7 assigns a dedicated production team plus a dedicated senior expeditor working three shifts to meet your delivery specification.
  • FasTrak 24/7 guarantees* to meet the agreed-to specified ship date.

Call for pricing. FasTrak service fees cover costs of additional services only, without additional profit.

 * Terra's FasTrak services limited guarantee: to ship on the ESD or date specified OR to refund up to 100% of FasTrak charges. This guarantee covers no direct, special, consequential or other damages and is strictly limited to up to 100% of the amount paid for FasTrak service. When a specified ship date is missed due to factors outside Terra's control (vendor performance, deliveries by shipping companies, etc.) and random factors such as accidents, the credit of up to 100% of the FasTrak 24/7 may not apply. FasTrak service requested after order placement will be quoted and accepted based on available time remaining before required ship date.