Semiconductor Probe Station
|
|||||||||||||||||||||||||||
Dimensions: 35.5"W x 25"D x 30"H (902 mm x 635 mm x 762 mm), plus 16" (406 mm) side clearance for air lock.
A continuous purge of filtered N2 maintains low humidity and particle counts inside these probe station enclosures. Self-balancing ionizing equipment neutralizes static charges to protect against electro-static discharge (ESD) in the low-humidity environment. Accordion-sleeve gloves provide easy access to the probe station, including sensitive X-Y-Z controls. A microscope lens diaphragm seals around eyepieces to permit focusing without disturbing the internal environment. The removable, resealable back or side walls permit installation of bulky probe equipment. Transparent plastics are acceptable in some applications. Others require the durability and enhanced moisture barrier protection of stainless steel with safety glass viewing windows. |