Terra Universal - Critical Environment Solutions

Preferred Client

Semiconductor Probe Station
Mini-Environments

Semiconductor Probe Station Mini-Environments
Model Shown: Enclosure for Alessi Probe Station
#REL-4100

Semiconductor Probe Station Mini-Environments

Semiconductor Probe Station Mini-Environments
Model Shown: Enclosure for Wentworth Probe Station #MP-950   Semiconductor Probe Station Mini-Environments
Dimensions: 34.5"W x 29.75"D x 24.75"H
(876 mm x 756 mm x 629 mm), plus 16" (406 mm)
side clearance for air lock)
Cat. $ $/Each
9000-04 Login
Application Requirements
  • Humidity:< 10% RH 3Process Gas: Nitrogen
  • Pressure: .1" WG positive pressure
  • Particle Control:Class 100 particle conditions
  • ESD Safety:Static neutralization in less than 30 sec. (1KV to 100V)
  • Access: Air lock pass-through Accordion-sleeve gloves. Microscope bellows to accommodate optics of standard probers (Alessi, Wentworth, etc.). Removable & resealable rear wall (for equipment installation)

Dimensions: 35.5"W x 25"D x 30"H (902 mm x 635 mm x 762 mm), plus 16" (406 mm) side clearance for air lock.


Cat. $ $/Each
Acrylic* 1540-00A Login
Static-Dissipative PVC 1540-01A Login
*Acrylic is damaged by alcohol and other cleaning agents.

A continuous purge of filtered N2 maintains low humidity and particle counts inside these probe station enclosures. Self-balancing ionizing equipment neutralizes static charges to protect against electro-static discharge (ESD) in the low-humidity environment.

Accordion-sleeve gloves provide easy access to the probe station, including sensitive X-Y-Z controls. A microscope lens diaphragm seals around eyepieces to permit focusing without disturbing the internal environment. The removable, resealable back or side walls permit installation of bulky probe equipment.

Transparent plastics are acceptable in some applications. Others require the durability and enhanced moisture barrier protection of stainless steel with safety glass viewing windows.

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